기술연구소

Research and
Development
DMZTM GDP
Glass Dicing System

DMZTM GDP Glass Dicing System is an abbreviation of Glass Dicing System which has designed as a full-body cut processing equipment of the various glasses. It enables scribe the thin film photovoltaic devices such as a-Si, CIGS film and cut the glasses including tempered glass for touch screen panel without any post-treatment.

1. PROCESS ENVIRONMENT
Applicable device: TSP, CIGS thin film PV, Various Glass
Substrate size: G2.0 ~ 4.0 (0.1~0.7t)
Process environment: atmosphere
2. VARIOUS MONITORING MODULE
In-situ monitoring system
CCD camera with illuminator
Auto focusing function
3. PROCESS MODULE
Laser source: UV, ultra-fast laser (It is selectable follow target material)
Hybrid optic system (scanner + flying optics)
Beam size @substrate: less than 10 um
Max, scan speed: 4.0m/sec
Precision XY-ZR stage
4. CONTROL SOFTWARE MODULE
Complete automation and control solution with DnA own software